-
Cat.No. Model Description Wafer W01-261-420 L12-FOSB Shipping Box (FOSB) 12 inch Cat.No. W01-261-420 Model L12-FOSB Carrier Type Front Opening Shipping Box (FOSB) Wafer Size 12 inch (300mm) Wafer Capacity 25 Wafer Spacing 10mm (±0.5mm Positional tolerance wafer to wafer, non-cumulative) Weight 4.9 kg (Empty) / about 8.1 kg (Full Loaded) Size Included Handler & Robotic Flange w395×d340×h338 mm Excluded Handler & Robotic Flange w388×d340×h333 mm * All datum established relative to kinematic coupling per SEMI
* Fist Wafer Position - 44mm nomial relative to horizontal datum plane